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标题: A Comparative Study of the Mechanical and Tribological Properties of Thin Al2O3 Coatings Fabricated by Atomic Layer Deposition and Radio Frequency Sputtering
作者: Grilli, Maria Luisa;Valerini, Daniele;Rizzo, Antonella;Yilmaz, Mehmet;宋晨;胡国行;Mikhaylov, Alexey;Chierchia, Rosa;Rinaldi, Antonio
论文类型: 期刊论文
期刊/会议名称: PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
年: 2022
卷: 219
期: 1