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标题: Monolithically integrated electro-optic modulator fabricated on lithium niobate on insulator by photolithography assisted chemo-mechanical etching
作者: LiangYouting;ZhouJunxia;YinDifeng;ZhengYong;QiHongxin;王敏;FangZhiwei;WuRongbo;程亚
论文类型: 期刊论文
期刊/会议名称: JOURNAL OF PHYSICS-PHOTONICS
年: 2021
卷: 3
期: 3