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标题: Optimization strategy for the velocity distribution based on tool influence function non-linearity in atmospheric pressure plasma processing
作者: JiPeng;LiDuo;SuXing;QiaoZheng;WuKaiji;SongLi;PengBing;WangBo
论文类型: 期刊论文
期刊/会议名称: PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
年: 2020
卷: 65
期: