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标题: Theoretical and experimental comparisons of the smoothing effects for different multi-layer polishing tools during computer-controlled optical surfacing
作者: LiXuyu;魏朝阳;ZhangSimin;徐文东;邵建达
论文类型: 期刊论文
期刊/会议名称: APPLIED OPTICS
年: 2019
卷: 58
期: 16