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标题: Effect of chemical action on the chemical mechanical polishing of beta-Ga2O3(100) substrate
作者: HuangChuanjin;ZhouHai;ZhuYongwei;XiaChangtai
论文类型: 期刊论文
期刊/会议名称: PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
年: 2019
卷: 56
期: