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标题: Fabrication of high-aspect-ratio fused silica microstructures with large depths using Bessel-beam femtosecond laser-assisted etching
作者: Song, Yunpeng; Xu, Jian; Liu, Zhaoxiang; Zhang, Aodong; Yu, Jianping; Qi, Jia; Chen, Wei; Cheng, Ya
论文类型:
期刊/会议名称: OPTICS AND LASER TECHNOLOGY
年: 2024
卷: 170
期: