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标题: Extracting focus variation data from coherence scanning interferometric measurements
作者: Liu, Jiayu; Hooshmand, Helia; Piano, Samanta; Leach, Richard; Coupland, Jeremy; Ren, Mingjun; Zhu, Limin; Su, Rong
论文类型:
期刊/会议名称: PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
年: 2024
卷: 88
期: