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标题: Random phase plate designed by the genetic algorithm for decoherence in energy homogenization units of a photolithography illumination system
作者: Liu, Jiahong; Zhang, Fang; Zhang, Pei; Li, Sikun; Huang, Huijie
论文类型:
期刊/会议名称: APPLIED OPTICS
年: 2024
卷: 63
期: 23