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标题: Fabrication of ultra-high-Q Ta2O5 microdisks by photolithography-assisted chemo-mechanical etching
作者: Li, Minghui; Zhao, Guanghui; Lin, Jintian; Gao, Renhong; Guan, Jianglin; Li, CHuntao; Qiao, Qian; Qiu, Yingnuo; Deng, Li; Qiao, Lingling; Wang, Min; Cheng, Ya
论文类型:
期刊/会议名称: OPTICS EXPRESS
年: 2024
卷: 32
期: 17