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标题: High-Extraction-Rate Ta2O5-Core/SiO2-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)
作者: Liu, Jian; Liang, Youting; Gao, Lang; Sun, Chao; Guan, Jianglin; Wang, Zhe; Liu, Zhaoxiang; Fang, Zhiwei; Wang, Min; Zhang, Haisu; Cheng, Ya
论文类型:
期刊/会议名称: NANOMATERIALS
年: 2024
卷: 14
期: 17