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标题: Effect of ternary compound on HfO2-Al2O3 2-Al 2 O 3 mixture coatings revealed by solid-state NMR and TOF-SIMS
作者: Wen, Jiahui; Ke, Liang; Ren, Jinjun; Shao, Jianda; Zhu, Meiping
论文类型:
期刊/会议名称: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
年: 2024
卷: 184
期: