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标题: Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching
作者: Li, Chuntao; Guan, Jianglin; Lin, Jintian; Gao, Renhong; Wang, Min; Qiao, Lingling; Deng, Li; Cheng, Ya
论文类型: 期刊论文
期刊/会议名称: OPTICS EXPRESS
年: 2023
卷:
期: 31