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标题: Effect of annealing on the properties of plasma-enhanced atomic layer deposition grown HfO2 coatings for ultraviolet laser applications
作者: Lin, Zesheng; Zhu, Meiping; Song, Chen; Liu, Tianbao; Yin, Chaoyi; Zeng, Tingting; Shao, Jianda
论文类型: 期刊论文
期刊/会议名称: JOURNAL OF ALLOYS AND COMPOUNDS
年: 2023
卷: 946
期: