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标题: Modeling and in-depth analysis of the mid-spatial-frequency error influenced by actual contact pressure distribution in sub-aperture polishing
作者: Zhang, Lanya; Wan, Songlin; Li, Hanjie; Guo, Hao; Wei, Chaoyang; Zhang, Dawei; Shao, Jianda
论文类型: 期刊论文
期刊/会议名称: OPTICS EXPRESS
年: 2023
卷: 31
期: 9