中国科学院上海光学精密机械研究所(简称:上海光机所)成立于1964年5月,是我国建立最早、规模最大的激光科学技术专业研究所。发展至今,已形成以探索现代光学重大基础及应用基础前沿、发展大型激光工程技术并开拓激光与光电子高技术应用为重点的综合性研究所。研究...
中国科学院上海光学精密机械研究所(简称:上海光机所)是我国建立最早、规模最大的激光专业研究所,成立于1964年,现已发展成为以探索现代光学重大基础及应用基础前沿研究、发展大型激光工程技术并开拓激光与光电子高技术应用为重点的综合性研究所。重...
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题目:Femtosecond laser processing of dielectrics: a micro-manufacturing platform for single-material multifunctional microsystems
姓名:Yves Bellouard
单位:Eindhoven University of Technology, Netherlands
时间:2014年11月19日(周三)下午2:30-4:00
地点:溢智厅
Abstract
Ultrafast lasers are characterized by ultra-high peak power pulses (Gigawatt/mm2 or even Terawatt/mm2 with table-top, commercial systems) leading to a radically different laser-matter interaction than conventional lasers: in particular, non-linear absorption phenomenon like multi-photons processes are observed opening new and exciting opportunities to tailor the matter in its intimate structure with spatial resolution smaller than the laser wavelength itself and noticeably, in three dimensions.
The first part of this talk will discuss the effect of low-energy pulses emitted by these lasers on silica glass from the viewpoint of structural and physical properties modifications. The second part will show how these laser-induced modifications can be used to manufacture novel types of micro-devices that integrate multiple functionalities in a single monolith. As an illustration, we will present various microsystems that perform opto- fluidics and opto- mechanical functions as well as examples of three dimensional flexures.
Bio
Dr. Yves Bellouard is Associate Professor in Micro-/Nano- Scale Engineering at the Mechanical Engineering Department of Eindhoven University of Technology in the Netherlands. He received a BS in Theoretical Physics and a MS in Applied Physics from Université Pierre et Marie Curie in Paris, France and a PhD from the Swiss Federal Institute of Technology (EPFL) in Lausanne, Switzerland in 2000. Before joining Eindhoven University of Technology in May 2005, he was Research Scientist at Rensselaer Polytechnic Institute (RPI) in Troy, New York for about four years where he started working on femtosecond laser processing of glass materials. Recently, he received an ERC Starting Grant and a JSPS Fellowship from the Japan Society for the Promotion of Science.
His current research interests are on new paradigm for system integration at the micro/nano- scale, in particular laser-based methods to tailor material properties for achieving higher level of functional integration in micro-devices.
所办公室
2014.11.18
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