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9月29日学术报告

来源： 发布时间：2014-09-24【字体：大 中 小】

　　题目：INO MEMS Foundry: Flexible Processing, Heterogeneous 3D in Integration, Hermetic Packaging and Complete Instrument Development　

　　姓名：Hubert Jerominek博士　

　　单位：INO (Institut national d'optique)　　

　　时间：2014年9月29日（星期一）上午9：30 

　　地点：溢智厅  

　　Abstract 

　　INO is equipped with a state-of-the-art MEMS fabrication facility.  This facility is adapted to processing of 150mm and 200mm silicon wafers as well as variable shape and material substrates, with a resolution down to 0.4 micron. We offer great flexibility in material selection and definition of complex multi-level process flows (up to 14 masking levels). Customers appreciate our expertise in microstructure simulations, surface micromachining with multiple sacrificial layers, monolithic integration of MEMS devices with CMOS electronics, heterogeneous 3D assembly, and hermetic packaging of assorted devices. 

　　Several examples of produced micro devices will be presented including VOx-based bolometric detector arrays, various types of micro mirror arrays, and pressure gauges. The 3D integration in the context of giant micro mirrors, multi-chip staggered IR detector arrays, and optical micro-benches will be described. High and low-end ceramic and metal hermetic packages will be shown. Foundry capacity will be given. Examples of complete instruments based on critical micro-components such IR camera cores will also be discussed. 

　　INO’s unique business model is based on custom manufacturing, technology transfers, joint R&D (product development), and joint ventures. We are looking for a feedback with new ideas for the next generation MEMS devices. 　　  

　　Hubert Jerominek 

　　Dr. Hubert Jerominek received his M.Sc. (Eng.) in Physics Engineering from the Silesian Technical University, Gliwice, Poland in 1978, and his Ph.D. (Eng.) in Technical Sciences from the Technical University of Wroclaw, Wroclaw, Poland in 1982. 

　　Dr. Jerominek joined INO as a researcher in 1988. Subsequently for several years Dr. Jerominek has held at INO a position of the Director of Technology and Business Development. At present he occupies a position of the Deputy-Vice President Business Development. 

Dr. Jerominek is an author of over 100 technical publications and 24 patents.

　　                                                               所办公室

　　                                                              2014.9.24

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