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5月7日学术报告通知

来源: 发布时间:2014-05-04【字体:

  报告人:Syarhei Avakaw博士  

  题目:New KBTEM-OMO Designs Based on Laser and Optical Technologies 

  时间:201457日上午1030  

  地点:溢智厅  

    

  Abstract:  

  The presentation gives the information about KBTEM-OMO, its structure and main business as well as the description of the laser and optical tools designed and manufactured by KBTEM-OMO for Mask Patterning and Wafer Patterning, Pattern Generators, Mask Defect Inspection tools, CD Inspection, Mask  Aligners, Steppers, Wafer micro and macro defect inspection tools, other inspection tools. 

    


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